MEMS TECHNOLOGY AND DEVICES: PROCEEDINGS OF THE ICMAT 2007 CONFERENCE
(With CD-ROM)
Singapore 1 - 6 July 2007

edited by Aiqun Liu, Jiuhui Wu (Nanyang Technological University, Singapore) Chun Lu & Chilla Damodara Reddy (Institute of High Performance Computing, Singapore)

This volume covers the current trends and developments in microelectromechanical systems (MEMS) technologies and devices, particularly applications that involve MEMS design, modeling, fabrication processes, lab-on-a-chip, biophotonic, medical devices such as DNA, protein and cell sorting, and nano devices. The contributions also explore new devices, process innovation, and engineering applications related to MEMS technology and devices.

Contents:

• High-Throughout Sample Introduction for Microfluidic Systems (Q Fang et al.)
• Test Patterns for Surface-Micromachined MEMS Structures (Q-A Huang)
• Integrated Micro Biosensor Systems (S Xia)
• A Micromachined Dual-Wavelength Tunable Laser (H Cai et al.)
• BioMEMS Device for Single Living Cell Detection (L K Chin et al.)
• Heterolayered Lead Zirconate Titanate of Different Stacking Sequence (F C Kartawidjaja et al.)
• Analysis of Ultrasonic Collection of Small Particles by a Tapered Metal Strip (Y Liu & J Hu)
• Aerodynamic Analysis of Slider for Micro-Actuator Application (S Mongpraneet et al.)
• 3D Cell Culture on a Microelectrode Array Silicon Chip (J Reboud et al.)
• Thermally Control of Drops in Micro-Channels (H T Teck et al.)
• and other papers

Readership: Professors and researchers working in MEMS/NEMS.

460pp		Jun 2007
978-981-270-960-8		US$149 / £80